Abstract
The cavitation aided machining as a precision micro manufacturing method is proposed, based on the new concept using positively the cavitation in a suction flow for machining phenomenon. That is to say, this manufacturing method makes loose abrasive grains, which are mixed with water as a carrier, to interfere in the workpiece surface with impact of the cavitation and flow of the machining fluid restricted partially by the restrictor above a machining point on workpiece surface. And the machining phenomenon occurs continuously along the workpiece surface by sliding a restrictor parallel to the workpiece surface along the flowing direction in the extended intake. The surface of polished glass plate is covered with masking firm except the required area for micro machining, and the surface is machined by the cavitation aided machining. The required micro profile on the glass plate is obtained after releasing mask. The fine micro groove or dimple can be generated by the machining method.
