Manufacturing and evaluation of surface roughness specimens (1st report)

Abstract

Calibration specimens are fundamental materials to assure the traceability of surface profilometer. A formerly developed manufacturing system had potential to produce good sinusoidal specimens, but still had waviness problem. The system was newly modified to make precision control of compressed air pressure and temperature of the machine, compressed air and environment. As the result, the system became capable to sinusoidal specimens better than NIST-SRMs