Proceedings of JSPE Semestrial Meeting
2006 JSPE Autumn Meeting
Session ID : C31
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Host: The Japan Society for Precision Engineering

Calibration of interferometric flatness measurement machine using a reference optical flat
*Youichi Bitou, Toshiyuki Takatsuji, Kensei Ehara
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Keywords: flatness, inteferometer, uncertainty
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[in Japanese]
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© 2006 The Japan Society for Precision Engineering
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