Driving Method for Piezoelectric Actuator by Using Current Pulse (3rd Report)

Abstract

The authors have proposed a driving method of a piezoelectric actuator by using current pulses for the high resolution. It was compared with the voltage drive with a linear amplifier. In open–loop control, the linearity by the current pulse drive was better than that by the voltage drive because of the hysteresis of the displacement to the applied voltage. In displacement feedback control by using a PID controller, the settling time and positioning accuracy by the current pulse drive performed as well as those by the voltage drive.