Abstract
Ordinary ultrasonic motors have a preload mechanism using a spring. A stator vibrator support and preload mechanisms comprise some component parts. Such a structure prevents to make an ultrasonic motor compact. The objective of this study is to make a small ultrasonic motor which can be easily miniaturized. Simple preload mechanism and support were realized by forming a stator vibrator and a flat spring for preload on an elastic metal plate bent into L–shape. From trial constructions of an ultrasonic spindle motor, the high–speed revolution of 100rps was obtained.