Surface Acoustic Wave Linear Motor Using Segment–Structured Diamond–Like Carbon Films on Contact Surface

Abstract

Surface acoustic wave (SAW) linear motor is a kind of ultrasonic motors. The advantages of the SAW linear motor is thin structure, high force, high speed and precise positioning. SAW linear motor has employed silicon slider with distributed projections and acquired high performances. In this research, segment–structured diamond–like carbon (S–DLC) films were applied instead of the silicon slider projections. We expected the films could increase abrasion–resistant performance of contact surface and acquire the same driving characteristics as the conventional silicon sliders. In this report, a silicon slider with S–DLC films was installed to a SAW linear motor. The slider worked successfully.