Proceedings of JSPE Semestrial Meeting
2006 JSPE Spring Meeting
Session ID : M38
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Host: The Japan Society for Precision Engineering

Improvement of Durability of UHV Compatible Rotary Feedthrough Using Ultrasonic Motor
*Shintaro Funami, Toshiki Niino
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Keywords: ultrahigh vacuum, ultrasonic motor, piezoelectric transducer, rotary feedthrough, nonmagnetic, wear
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[in Japanese]
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© 2006 The Japan Society for Precision Engineering
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