Study on high precise 3–dimensional coordinate measurement with laser trapping probe

Abstract

Manufactures have being strongly desiring dimensional measurement instruments that have an ability to measure complex shaped microscopic objects. In this paper, a prototype of Nano–CMM, which equipped the laser trapping probe as a high sensitive position detection probe and 3–axes–stage with high accurate linear scales as a positioning stage, was introduced. This study aims to finally achieve the dimensional measurement of micro–devices such as micro–parts or micro–lens dies, for which measuring range of over 10mm and measuring accuracy of 10nm should be accomplished.