Abstract
Planar linear motor is a kind of 2D precision positioning stage, which is different from the usual XY stage and consisted of multiple linear motors arranged orthogonally in the same layer. It is a general way to employ laser interferometers and reflecting mirrors as the positional sensor of the planar linear motor for nano–order resolution′s application. A low cost and simple method is proposed for users to calibration the accuracy of the planar motor without square–gauge or cross grid–scale. In this paper, x–axis reflecting mirror is measured by straightness method and 2–point method. Next, a method to measure the squareness error of motor motion is explained, which uses a common hexahedral block and no need a high accuracy datum like a square–gauge. According to the measured profile and the squareness of the reflecting mirrors, the geometry motion error could be calibrated when ignoring the error from the flatness of the platen.
