Abstract
The authors developed a position measurement system using position sensitive detectors (PSDs) for a miniature robot. The measurement error includes the systematic error which consists of the arrangement error of measurement system and the PSD output error. We evaluate the PSD error by using the standard stage, which is used for the error compensation. The error in the PSD output is compensated by using the compensation factor, which cannot compensate the non linearity of the PSD output. In this paper, we describe the error compensation of the position measurement system and propose the error correction method using the least–square method. The experimental results indicate the feasibility of the proposed method. We discuss the accuracy of the position measurement.
