Abstract
High flatness and smoothness is required to a rectangular glass mask. However, it is difficult to polish rectangular plates with a rotary polishing machine. The calculation program of polishing process for a rectangular plate has been developed and the consistency between experimental and simulation results was examined. This paper describes a new method to compensate the inclination of a tool and the comparison of polishing profiles between the experiment and the simulation. It were clarified that the new method hardly has the calculating error as compared with the old eccentric–load–compensation method, and the simulated results agreed well with experimental results for workpieces with good and bad flatnesses, two kinds of tool diameters and some oscillation ranges at the uniform oscillation speed.
