Proceedings of JSPE Semestrial Meeting
2006 JSPE Spring Meeting
Session ID : K81
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Host: The Japan Society for Precision Engineering

Decreaser thermal drift on small ultraprecision positioning device by peltier module
*norio matsuura, jiro otuka, kouji suda, souji itikawa
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Keywords: ultraprecision positioning, peltier module, Decreaser thermal drift
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[in Japanese]
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© 2006 The Japan Society for Precision Engineering
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