MEMS mirror device using vertical electrostatic comb–drive actuators for tilting and vertically driving

Abstract

We have proposed a MEMS (Micro Electro Mechanical Systems) mirror device which can be tilted and also driven vertically with keeping the parallel position in high precision and high resolution. The mirror device was fabricated using micro fabrication technologies. The configuration was designed with three vertical electrostatic comb–drive actuators and hinges at the periphery of the mirror. We have evaluated the moving characteristics and confirmed that the mirror device could be driven vertically to about 4μm and also could be tilted , and the resolution was 0.1μm/V