Proceedings of JSPE Semestrial Meeting
2006 JSPE Spring Meeting
Session ID : L25
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Host: The Japan Society for Precision Engineering

Rotary Microactuator
*Seiichi Hata, Hiroaki Akamatsu, Takashi Fukushige, Akira Shimokoube
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Keywords: microactuator, MEMS, electrostatic actuator, rotary actuator, cantilever
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[in Japanese]
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© 2006 The Japan Society for Precision Engineering
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