Displacement Control of an Electrostatic Microactuator Using a Built–in Sensor

Proceedings of JSPE Semestrial Meeting

2006 JSPE Spring Meeting

Session ID : L24

DOI https://doi.org/10.11522/pscjspe.2006S.0.925.0

Conference information

Host: The Japan Society for Precision Engineering

Displacement Control of an Electrostatic Microactuator Using a Built–in Sensor

*Takehiko Hayashi, Takashi Fukushige, Seiichi Hata, Akira Shimokohbe

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Keywords: microactuator, electrostatic force, built–in sensor, capacitance, closed–loop control

CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract

[in Japanese]

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© 2006 The Japan Society for Precision Engineering

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