Development on a Ultraprecision On-the Machine Measurement System of Aspherical Form (2nd Report)

Development of Ultra Precision Measurement Unit made of SIALON and Form Accuracy Evaluation in Constant Contact Angle Scanning Method

Abstract

Recently, the necessity of the measurement on the ultraprecision machining of asphere shape such as optical devices is rising. In the conventional contact type of measuring method, there is a problem with a drift of the transformation of the probe by the measurement pressure and the temperature change. Then in this research, the air bearing slide a high rigidity, a low thermal expansion, and made of the light ceramics, was developed and constant contact angle scanning method with 45 degrees tilted probe was developed. In the experiment, the evaluation of the measurement accuracy was carried out.