Proceedings of JSPE Semestrial Meeting
2007 JSPE Autumn Conference
Session ID : F39
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Birefringence measurement by scanning near-field ellipsometry
*Shinya OhkuboSatoshi Hirayama
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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract
In this research, it is tried to measure the local birefringence of the sample quantitatively. In this paper, the scanning near-field ellipsometer system with an apertureless probe has been created. Moreover, the method of observing birefringence has been described.
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© 2007 The Japan Society for Precision Engineering
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