Proceedings of JSPE Semestrial Meeting
2007 JSPE Spring Meeting
Session ID : C26
Conference information

Host: The Japan Society for Precision Engineering

Effect of Mist Spray on Mirror Grinding of Brittle Materials
*Hideo Shibutani, Jun-ichi Ikeno, Akihiko Suzuki
Author information
Keywords: silicon wafer, mirror grinding, mist spray
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (677K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
Mirror grinding wheels composed of a cerium oxide abrasive and sodium alginate binding-agent were developed using electrophoretic deposition phenomenon. And disk-shaped optical glass samples with a diameter of 3 inches were ground on an ultra-precise surface grinder. As the results, the mirror surface was obtained in a few minutes and the roughness was 1nmRa and 9nmRz.
Content from these authors
© 2007 The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top