Abstract
Touch probe is widely used in high precision length measuring system for the shape error measuring of optical elements, such as aspheric lens, and other accurate parts. However the main causes of measuring error are straightness error and movement error of stage where measuring probes or work pieces are mounted on. A high precision length measuring system has been developed based on real time compensation of the straightness and movement errors of stage guider by using two touch probes. Experiment results show high precision measurement has been realized by using developed system.
