Abstract
This study describes the development of measurement system for micro parts. The concept for micro measurement center that can measure profile, roundness, and hole profile of micro parts, is proposed. We developed a measurement system for micro cylinder that is a basic system for this measurement center. The system has two micro-contact probes, which are arranged in the opposite side. Each probe motion is measured by precision displacement sensor. These probes measure a diameter and roundness of the micro cylinder on spindle. The results guarantee the validity of this system that measures the micro cylinders in sub-micron order.
