Proceedings of JSPE Semestrial Meeting
2008 JSPE Autumn Conference
Session ID : C31
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Host: The Japan Society for Precision Engineering

Three-Wavelength Single-Shot Interferometry
*Katsuichi Kitagawa
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Keywords: interferometry, surface profile, three-wavelength, single-shot, fringe analysis
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Abstract

[in Japanese]

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© 2008 The Japan Society for Precision Engineering
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