2008 JSPE Autumn Conference
Session ID : C32
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Host: The Japan Society for Precision Engineering
Measurement of the absolute optical thickness distribution of a mask-blank glass by a phase-shifting, wavelength tuning interferometry
*Yangjin Kim, Kenichi Hibino, Youichi Bitou, Sonko Osawa, Naohiko Sugita, Mamoru Mitsuishi
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