Proceedings of JSPE Semestrial Meeting
2008 JSPE Autumn Conference
Session ID : D19
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Host: The Japan Society for Precision Engineering

Thin-Film Thickness Evaluation for Nano-Imprint by using Near-Field Optics(4th Report)
Theoretical Study on Measurement of Residual Layer Thickness Using Local Plasmon Resonance
*Tenpei Nagao, Shin Usuki, Satoru Takahashi, Kiyoshi Takamasu
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Keywords: nearfield light, local plasmon resonance, nano-imprint lithography, thickness measurement, residual layer thickness
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[in Japanese]

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© 2008 The Japan Society for Precision Engineering
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