Direct measurement of spindle error motion using regular crystalline lattice and scanning tunneling microscope

Experiment of two-dimensional displacement measurement

Abstract

Since we are researching in the direct measurement of the spindle error motion using the regular crystalline lattice and the scanning tunneling microscope (STM), the two-dimensional displacement measurement with a resolution of sub-nanometer or less is required. In a previous research, we proposed the two-dimensional displacement measurement method with 10-picometer resolution using a combination of the STM and the highly oriented pyrolytic graphite (HOPG) crystal. However, it is difficult to design and use due to the method needs two STM tips. In this article, therefore, the new measurement method with only one STM tip based on the multi-tunneling-probe STM technique is proposed. From the experimental result, this new method shows a capability of the displacement measurement with sub-nanometer or several 10 picometer resolution.