Evaluation of straightness measurement system using 3 point method with zero adjustment method

Abstract

Second differences of straightness were analytically derived from measurements by applying restriction conditions estimated from behavior of measurements to measurement model using 3 point method with zero adjustment method. By obtaining straightness from them, influences of fluctuations in calibrated zero differences were reduced comparing to the conventional method correcting by statistically averaged values. Performances of the straightness measurement system were evaluated by comparing straightness derived from measurements using 2 kinds of integrated 3 point methods and 3 kinds of inverse methods.