Host: The Japan Society for Precision Engineering
This paper describes the measuring method of the straightness for 2-D stage. The position of 2-D stage which has two straight edges in X and Y-direction is measured by laser interferometer. This measuring result includes two kinds of errors which are motion errors of the stage and profile errors of the reference mirrors. Multi-point method is generally used in measuring straightness. However, multi-point method includes zero-adjustment errors. So we proposed the new method that a single probe was used for each axis measurement. It isn't necessary to consider zero-adjustment errors in the proposed method. We present the result applying our proposed method to the low vibration stage in this paper.
