Proceedings of JSPE Semestrial Meeting
2008 JSPE Autumn Conference
Session ID : F63
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Host: The Japan Society for Precision Engineering

Study on Polishing of Fused Quartz with Pyramidal Structured Polishing Pad
*Ryunosuke Sato, Yoshio Ichida, Koji Kato
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Keywords: Pyramidal structured polishing pad, Fused quartz, Polishing velocity, Released abrasive
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Abstract

[in Japanese]

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© 2008 The Japan Society for Precision Engineering
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