Proceedings of JSPE Semestrial Meeting
2008 JSPE Autumn Conference
Session ID : F64
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Host: The Japan Society for Precision Engineering

[title in Japanese]
*Yuuya Yamaguchi, Yasuhiro Tani
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Keywords: polishing
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Abstract

Good polishing performance can be obtained using silica particles as carrier particle in 4-body polishing.

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© 2008 The Japan Society for Precision Engineering
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