Abstract
Design and fabrication of an electrostatic induction generator using micro electret film cantilever is presented. Energy harvesting technique is needed for maintenance-free ubiquitous network systems. In erectret cantilever vibration, the amount of the induced charge on the counter electrode is changed due to the change in the electrode interval because of electrostatic induction mechanism. So, electric power is generated when the cantilever is moved. The device can convert mechanical vibration energy into electric energy. We fabricated the CYTOP erectret generator having the Si cantilever of 3.5 mm in length, 1.0 mm in width and 115 μm in thickness by micromachining. It is shown that the generator has 350 pW as the maximum power at the resonant frequency of 16.64 kHz.
