Proceedings of JSPE Semestrial Meeting
2008 JSPE Autumn Conference
Session ID : J69
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Host: The Japan Society for Precision Engineering

[title in Japanese]
*Kazuaki Ueda, Kazuya Zettsu, Kazuya Yamamura, Shuji Maeo, Shoichi Shimada, Tadashi Utaka, Kazuo Taniguchi
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Keywords: Double curved crystal, Numerically control, HF-HNO3, Wet etching
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[in Japanese]
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© 2008 The Japan Society for Precision Engineering
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