Proceedings of JSPE Semestrial Meeting
2008 JSPE Autumn Conference
Session ID : J73
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Host: The Japan Society for Precision Engineering

Development of fast linear table for ultrahigh precision machining
*Yutaka Yamagata, Shin-ya Morita, Hirofumi Suzuki, Toshiro Higuchi, Toshikiyo Makino, Kazushi Yoshida, Mitsuo Kondo
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Keywords: ultrahigh precision machining, linear motor, position control
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[in Japanese]
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© 2008 The Japan Society for Precision Engineering
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