2008 JSPE Spring Conference
Session ID : D82
Conference information
Host: The Japan Society for Precision Engineering
Amplitude Evaluation of Thermal-Mechanical Vibration for Carbon Nanopillars
*Keiichiro Nonaka, Kojiro Tamaru, Masao Nagase, Hiroshi Yamaguchi, Shin'ichi Warisawa, Sunao Ishihara
Author information
Keywords:
thermal-mechanical vibration,
amplitude,
carbon nanopillar,
scanning electron microscope,
spring constant,
focused-ion-beam chemical vapor deposition
Details
