Proceedings of JSPE Semestrial Meeting
2008 JSPE Spring Conference
Session ID : D81
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Host: The Japan Society for Precision Engineering

Nanometrology of Si Fine Patterns Having a Rectangular Profile using AFM Carbon Nanotube Probes
*Daisuke Kou, Yoshio Ichida, Ryunosuke Sato
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Keywords: Carbon Nanotube, Nanometrology, Atomic Force Microscope
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[in Japanese]
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© 2008 The Japan Society for Precision Engineering
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