3 DOF Scanning Probe using Parallel Link Mechanism

2nd Report: Development of an experimental system and control algorithm for active scanning motion

Abstract

Based on the optimum design proposed in the 1st report, an experimental system of the 3-dof active scanning probe using voice coil motors and parallel link mechanisms was developed. Impedance control which can arbitrary set mechanical impedance (mass, viscosity and stiffness) at the measurement point was installed for active scanning motion. In order to realize the desired impedance for actual environment, an advanced control method with simplified nonlinear dynamics compensation and disturbance observer was proposed. Effectiveness of the proposed method was confirmed by numerical simulations.