A high-precision micro-ball stylus

Abstract

Micro-structured surfaces such as micro-aspheric lenses/lens arrays and micro-gears are getting increasingly important in industries. We have developed a micro-ball stylus for measurement of 3D micro-structured surfaces. To measure such surfaces, micro-ball stylus whose tip ball is less than several micrometers in diameter is necessary. A precision glass micro-ball is glued on the top of the micro-ball stylus. The diameter of micro-ball is under 50 µm.