Abstract
When super positioning precision is demanded in an aerostatic lead screw, the manufacturing accuracy of the male screw and the female screw which are the bases of the system is requested extremely strict. However a high precision screw cannot be made with the grinding technology which the mainstreams method of manufacturing precise screw, when the profile of frank surface becomes important point. In this study, a super hand finishing method with exact precision is suggested, from this suggestion the device for super finishing of the male screw is designed and produced. The outline of this device and the results of the super finishing will be reported in this paper.
