Proceedings of JSPE Semestrial Meeting
2008 JSPE Spring Conference
Session ID : G02
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Host: The Japan Society for Precision Engineering

Development of micropump with small amount of flow rate
*Akifumi Morishima, Atsushi Takamata, Kazuyoshi Tsuchiya, Yasutomo Uetsuji
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Keywords: Micropump, PZT, Piezoelectric actuator, Sputtering, Thin film, Flow fuction
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[in Japanese]
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© 2008 The Japan Society for Precision Engineering
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