Abstract
This paper describes the improvement of the fabrication method of the MEMS optical switch proposed by the authors. Its basic switching unit consists of two glass substrates which have many electrodes on the surface and a belt-shaped thin film mirror between the glass substrates. The thin film mirror is deformed and driven by electrostatic force. To realize a multi-channel optical switch by combination, the improvement of the assembly accuracy and the solution of low repeatability problem are important. As the solution to these, the following two approaches are examined. One is the integration of the electrode array and the thin film mirror on the glass substrate. The other is the assembly of the parts using servo mechanism. Then, the characteristics of the fabricated optical switch are evaluated.
