Proceedings of JSPE Semestrial Meeting
2008 JSPE Spring Conference
Session ID : G19
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Host: The Japan Society for Precision Engineering

Micro Deformation of Probe by UV Laser Irradiation and its Application to Sub-micron Positioning
*Naoki Naruo, Akira Kakuta, Yuji Furukawa
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Keywords: UV laser, Submicron deformation, Microbar, Atomic force microscope, Crystallographic structure
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[in Japanese]
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© 2008 The Japan Society for Precision Engineering
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