Development of Arrayed MEMS Ultrasonic Transmitter/Receaver using Parylene Film

Abstract

This paper reports the development of an arrayed device, which can act as both transmitter and receiver for an ultrasonic pulse in the air. The device is composed of micromachined capacitive structures with Parylene diaphragms, each of which can generate large sound pressure and realize high sensitivity based on the non-brittle and flexible characteristics of polymer Parylene By setting a delay time for adjacent diaphragm, the control of transmitting and receiving directivity is successfully achieved.