Abstract
Imitating the mosquito's proboscis, the present paper proposes the combined silicon microneedles comprising a central straight needle and two outer jagged needles. The effectiveness of these needles for easy insertion is three dimensionally investigated by the finite element method (FEM) simulation. Based on the result, the insertion mechanism of the mosquito's proboscis is discussed. The various types of silicon microneedles are fabricated using a SOI wafer and DRIE process. The resistance force during inserting a fabricated needle to an artificial skin of silicone rubber was experimentally investigated, which confirms the effectivenss of combining needles on easy insertion. The effect of harpoonlike jagged shape and applying vibration during insertion is also discussed.