2008 JSPE Spring Conference
Session ID : J01
Conference information
Host: The Japan Society for Precision Engineering
Micro Fabrication by Tribo-Nanolithography and Wet Chemical Etching(2nd Report)
High-Aspect Ratio Structure Fabrication
*Tatsuya Fukase, Noboru Morita, Noritaka Kawasegi, Shigeru Yamada, Noboru Takano, Tatsuo Oyama, Kiwamu Ashida
Author information
Keywords:
Tribo-nanolithography,
Atomic force microscope,
Microfabrication,
Wet chemical etching,
Single crystal silicon,
Cantilever for machining
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