Proceedings of JSPE Semestrial Meeting
2008 JSPE Spring Conference
Session ID : K10
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Host: The Japan Society for Precision Engineering

Compressive Behavior of Micro-scaled DLC Structure Produced by FIB-CVD
*Naomichi Sakamoto, Yasuo Kogo, Takuya Yasuno, Jun Taniguchi, Iwao Miyamoto
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Keywords: diamond-like carbon, focused ion-beam chemical vapor deposition, compressive behavior, Young's modulus, high-resolution transmission electron microscopy
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[in Japanese]
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© 2008 The Japan Society for Precision Engineering
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