2009 JSPE Autumn Conference
Session ID : C02
Conference information
Host: The Japan Society for Precision Engineering
Development of surface-figure metrology system based on stitching technique for x-ray long-mirrors at SPring-8
MSI (Microstitching Interferometry) and RADSI (Relative Angle Determinable Stitching Interferometry)
*Hirokatsu Yumoto, Takanori Miura, Hidekazu Mimura, Takashi Kimura, Haruhiko Ohashi, Shunji Goto, Kazuto Yamauchi, Tetsuya Ishikawa
Author information
Keywords:
surface figure metrology,
stitching interferometry,
x-ray mirror,
x-ray optical device,
aspheric mirror,
synchrotron radiation
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