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2009 JSPE Autumn Conference

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[title in Japanese]

Kenichi Ikeda

Session ID: A01
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.1.0

CONFERENCE PROCEEDINGS FREE ACCESS

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Peeling technology of silicon wafer by YAG laser

Hiroki Ito, Junichi Ikeno, Hideki Suzuki, Yousuke Kunishi

Session ID: A02
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.3.0

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Insulating treatment of organic conducting layer with femto-second laser

Yosuke Iyama, Junichi Ikeno, Hideki Suzuki, Yosuke Kunishi

Session ID: A03
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.5.0

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Focused ion beam machining of silicon carbide of three-dimensional mold

Takashi Okumoto, Kousuke Sawai, Jun Taniguchi, Shin-ichi Satake, Shun ...

Session ID: A04
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.7.0

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[title in Japanese]

Kakumasa Eguchi, Hikaru Yamagishi, Yuji Wakabayashi, Keigo Oguchi, Haj ...

Session ID: A05
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.9.0

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Indentation tester under high hydrostatic pressure

Masahiko Yoshino, Kazuaki Uchida, Naoki Yoshikawa

Session ID: A07
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.11.0

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Development of Direct Imprint Lithography for Maskless Fine Patterning (1st Report)

Effect of Surface Wettability on Patterning Process for Cu Interconnect Lines

Shinji Tanaka, Kenta Kondoh, Takayuki Shibata, Takahiro Kawashima, Tos ...

Session ID: A08
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.13.0

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[title in Japanese]

Takamasa Tamura, Makoto Umetani, Kazuhiro Yamada, Yasuhiro Tanaka, Har ...

Session ID: A09
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.15.0

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Duplication of Surface Texture Measurement Standard by Nanoimprinting Technology

Yukihito Yamaguchi, Kazuhisa Yanagi, Hidetake Tanaka, Masahide Yamaoka ...

Session ID: A10
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.17.0

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Self-Assembly of Fine-Particles with the Aid of Patterned Wettability(8threport)

Kojin Narita, Arata Kaneko, Nobuyuki Moronuki

Session ID: A14
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.19.0

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Fine particles can be self-assembled only on hydrophilic region of patterned substrate by drawing up from the suspension. This study aims to reveal effects of suspension properties, such as surface tension, concentration of particles, and particle diameter, on the results of self assembly mechanism. The hydrophobic material was octadecyltrichlorosilan (OTS). It was transferred onto a silicon oxide surface with micro contact printing. The OTS pattern was 50mm width of line-and-space. The contact angle of a drop of water on hydrophilic material (SiO2) was 5-, and that on hydrophobic material (OTS) was 100-. It was found that the change of suspension properties have strong effects on the assembly mechanism and the coverage of particles. For example, the coverage increased with the increase of the particle concentration.

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Reearch on Chemical Reaction Assisted Picosecond Pulsed Laser Cleavage-cutting of Silicon Wafer

Takeyuki YAMAMOTO, Takashi MIZOGUCHI, Fumihiro AIZAWA, Libo ZHOU, Jun ...

Session ID: A15
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.21.0

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The direct metal transfer patterning using oxide metal release film

Noriyuki Unno, Shouichi Ide, Shouichiro Ishikawa, Jun Taniguchi

Session ID: A16
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.23.0

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Formation of Through-Chip Porous Noble Metal Layers on Silicon Substrates

Taku Matsuzaka, Junnichi Shimanuki, Masanori Hayase

Session ID: A17
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.25.0

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Analysis of Natural Convection in Copper Deep Trench Filling

Kiyonobu Aota, Naoki Mizukoshi, Masanori Hayase

Session ID: A18
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.27.0

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Micro Ball Endmill Made of Nano-Polycrystalline Diamond

Takuya Senba, Ryuichi Okazaki, Hitoshi Sumiya

Session ID: A20
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.29.0

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Micro ball endmill with a tool tip radius of 50 μm was made using both the single crystal diamond and the nano-polycrystalline diamond as a tool material. It was verified through the cutting test of cemented carbide with a hardness of 1350 Hv that a chipping strength of the nano-polycrystalline dimond is extremely high than that of single crystal diamond.

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Micro taper machining of an optical fiber end for an on-site connector

Shinsuke Matsui, Ryo Nagase, Shuichiro Asakawa, Yoshiteru Abe, Shigeru ...

Session ID: A21
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.31.0

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Development of Bioprobe Integrated with Microneedle for Cellular Function Analysis (4th Report)

Evaluation of Mechanical Strength of Microneedle and AFM Imaging Performance

Norihisa Kato, Syuhei Horiike, Takayuki Shibata, Takahiro Kawashima, T ...

Session ID: A22
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.33.0

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Smart Nano-Machining and Measurement System with Diamond AFM Probe (2nd Report)

Fabrication of Sharpened Diamond Tip on Si Cantilever

Tadashi SUTOU, Kazuhiro MARUNO, Takayuki SHIBATA, Takahiro KAWASHIMA, ...

Session ID: A23
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.35.0

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3D MD model combined with FEM

Tomoki Iwatani, Shoichi Shimada, Hiroaki Tanaka

Session ID: A31
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.37.0

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A three dimensional molecular dynamics (MD) model combined with a finite element method (FEM) is proposed for the analyses of micromachining process. In the connecting area of the model, the displacement of a node in FEM model is given by the average displacement of atoms around the node in MD model. On the other hand, the force generated at a node in FEM model is divided among the atoms around the node in MD model. The both models are connected well by the method proposed.

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Hardness of Polyethylene Wax for Easy-to-cut Material

Katsumi Mizutani, Kazuo Murata

Session ID: A32
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.39.0

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Study on lathe turning of hardened steel with small diameter

Etsuro Yoneta, Hiroo Shizuka, Masayuki Nunobiki, Koichi Okuda

Session ID: A33
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.41.0

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Creation of Microgroove with Flat-end for Difficult-to-cut materials

Yuto Misawa, Keiichi Nakamoto, Tohru Ishida, Yoshimi Takeuchi

Session ID: A36
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.43.0

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High Efficiency Machining of Hard Material by Chamfered Diamond Tool

Xin Rui Tang, Miki Yoshinaga, Keiichi Nakamoto, Tohru Ishida, Yoshimi ...

Session ID: A37
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.45.0

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Development of Sculptured Surface Machining Technology for Hardened Steel by Utilizing Two-degree-of-freedom Elliptical Vibration Tool

Norikazu Suzuki, Hideo Yokoi, Eiji Shamoto, Seiji Hamada, Takashi Ueya ...

Session ID: A38
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.47.0

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Development of Sub-MHz Elliptical Vibration Tool

Norikazu Suzuki, Keisuke Maruko, Eiji Shamoto

Session ID: A39
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.49.0

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[title in Japanese]

Toshimichi Moriwaki

Session ID: A61
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.51.0

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Non-contact Method for detecting position of a Micro-endmill using the peak of a contrast

(2nd report) Detecting Tool position (Z and XY directions ) of Actual Micro-endmill

Shinya Suzuki, Kazuhide Kamiya, Yukio Maeda, Takashi Nomura

Session ID: A62
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.53.0

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Precision Molding of Micro Metallic Glass Components (2nd report)

Hirofumi Suzuki, Kazumichi Machida, Toshikiyo Makino, Daisuke Mukohata ...

Session ID: A63
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.55.0

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Aspheric optics form representation considering fabrication profile errors using Nagata-patch

Shin-ya Morita, Yutaka Yamagata

Session ID: A64
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.57.0

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We introduced a form representation method of aspheric lens surface considering its form errors on the fabrication process for a machining tool path generation compensating form errors and optical simulation. The method uses a local interpolation technique by parametric quadratic patches with normal vectors proposed by Nagata, in order to obtain lens models with nanometer precision without increasing the number of patches. The aspheric lens shape including a spatial mid-frequency form error has been expressed by this method.

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Development of precision CAM using Nagata patches

Yutaka Yamagata, Shin-ya Morita, Yoshihiro Uehara

Session ID: A66
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.59.0

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The Nagata patch is a surface representation method using quadratic equations, which has contnuity between neighboring patches and has possiblity to parallelized calculation. A CAM software for CNC machine tool using Nagata patches is developed and machined result and precision verification will be reported.

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Wear mechanism and pattern of diamond tool

Yoshitaka Yamaji, Naomichi Furushiro, Masahiro Higuchi, Tomomi Yamaguc ...

Session ID: A67
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.61.0

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Manufacturing of Large-area Microstructure Arrays by Combining Micro Indentation andUltraprecision Cutting

(1st report) A Preliminary Study

Jiwang Yan, Horikoshi Akihiro, Kuriyagawa Tsunemoto

Session ID: A68
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.63.0

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A new manufacturing method for large-area micro lens arrays by combining micro nanoindentation and ultraprecision cutting was proposed. First, micro nanoindentation was performed on mold materials, such as copper and electroless-plated nickel, to obtain micro dimples with curved cross-sectional profiles. The indenter shape was compensated by considering the elastic recovery of workpiece material which could be predicted via the finite element method (FEM). The burrs generated around the dimples were removed by ultraprecision cutting with diamond tools. The indented surface was found to be harder than that of the precut surface, which is beneficial for mold service life.

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[title in Japanese]

Katsutoshi Tanaka

Session ID: B01
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.65.0

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Adaptive cutting process control based on Digital Copy Milling concept

Takashi Shimada, Keiichi Nakamoto, Keiichi Shirase

Session ID: B03
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.67.0

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In this study, the Machining Strategy Algorithm to adapt feed speed, radial and axial depths of cut during milling operation, and to stop milling operation has been integrated into the autonomous CNC machine tool controlled by the Digital Copy Milling concept we proposed. The tool breakage avoidance was demonstrated when sudden increase of cutting load was detected. Furthermore, about 16 % of total machining time was shortened under the adaptive cutting conditions in the milling experiment.

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Virtual tool-workpiece closed loop control by using high response fine motion mechanism

Tomoya Fujita, Atsushi Matsubara, Yusuke Koike

Session ID: B04
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.69.0

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A study on contouring motion control of machine tools

First Report: Analysis of Dynamic Motion Error

Cefu Hong, Kotaro Nagaoka, Atsushi Iizuka, Atsushi Matsubara, Soichi I ...

Session ID: B06
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.71.0

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In our research, we analyze the control methods to obtain high accuracy synchronous motion in feed-drive system of machine tool. First, we investigate how to define contouring motion error for error diagnosis. Second, the influences of the command and control characteristics on the dynamic contouring errors are analyzed by using motion error traces. Then, a diagnosis method with the square motion is proposed and carried out on the experiment.

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Development of Device for Compensation of Measurements on Machining Centre

Yoshinori Nagasu, Yoshirou Nakajima, Kesatomi Wada, Keigo Oguchi, Yuji ...

Session ID: B07
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.73.0

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Implementation of Time-Optimal Trajectory for Machine Tools by Contouring Control

Kazunori Mori, Naoki Uchiyama, Takuya Honzu, Shigenori Sano, Shoji Tak ...

Session ID: B08
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.75.0

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An Active Aerodynamic Bearing for a High-speed Precision Air-bearing Spindle

Hiroshi Mizumoto, Yoshito Yabuta, Shiro Arii, Yoichi Tazoe, Shigeru Yo ...

Session ID: B09
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.77.0

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Air-bearing spindle is an essential machine element of the ultraprecision machine tool. In the present paper, a high-speed precision air-bearing spindle is proposed for small diameter of end-mills and grinding wheels. For suppressing the spindle vibration at high rotational speed, an active aerodynamic bearing is incorporated into the aerostatic bearing system. Final goal of this hybrid spindle is as follows: the spindle vibration is less than 0.1um at the maximum rotational speed of 100,000min-1. According to the vibration detected by a sensor, a microcomputer controls the wedge angle of the aerodynamic bearing surface by using a piezoelectric actuator incorporated. Fundamental performance of the hybrid spindle is reported and the method for improving the performance is discussed.

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Vibration Analysis of Micromilling Machine on the Passive Vibration Isolation System

Takahiko Hirooka, Atsushi Matsubara, Daisuke Kono, Masashi Yasuda, Tak ...

Session ID: B13
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.79.0

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Influence of Workpiece Stiffness on Tool Life

Yusuke Koike, Atsushi Matsubara, Yosuke Nakatsukasa, Iwao Yamaji

Session ID: B14
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.81.0

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Analysis of cutting force in end milling by a small-diameter tool

Kohei Tsuchida, Atsushi Matsubara, Iwao Yamaji

Session ID: B15
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.83.0

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The objective of this paper is to study the cutting mechanism under a small depth of cut to perform end milling by a small-diameter tool in the sub-micrometer level machining accuracy. First, a prediction model of cutting force is presented based on the interference of cutting edge and workpiece. We compared its estimates with actual cutting forces measured in experiments. It was observed that the ratio of high-frequency components in each cutting force component is significantly different from its estimate when the axial depth of cut was small.

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Use of a high precision planetary gear in a machine tool application

Norio Shirokoshi

Session ID: B16
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.85.0

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Surface Hardening and Formation of Compressive Residual Stress on Shaft by Frictional Stir Burnishing using Multi-tasking Machine

Hiroyuki Sasahara, Tomonori Nishigaki, Yoshimasa Takada, Toshiaki Sega ...

Session ID: B18
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.87.0

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Study on high speed step feed drilling using microdrills for Printed Wiring Boards (PWB)

Yutaka Takeda, Toshiki Hirogaki, Eiichi Aoyama, Keiji Ogawa, Hiroshi N ...

Session ID: B19
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.89.0

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Vision-based Measurement of Two-dimensional Position Errors of a Machine Tool

Yusuke Tanizawa, Soichi Ibaraki, Atsushi Matsubara

Session ID: B20
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.91.0

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This research presents vision-based measurement of two-dimensional position errors for machine tools. In experiment, we attach a charge coupled device (CCD) camera to the spindle to view an artifact of the known form accuracy. The edge in the vision is detected by using the Sobel operator and the position of the camera with respect to the artifact is measured from it. In this paper, we use a grid evaporated on a glass plate as an artifact to measure straightness and squareness of the drive system. For comparison, we measure them with an eddy-current displacement sensor and a square edge. By using this measurement result, we evaluate the identification accuracy of this vision-based measurement.

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A Measuring Method for Spindle Runout-Error using Magneto-Resistance Device

Comparison with capacitance displacement meter

Masumi Izumi, Akio Ochi, Jun Satonobu, Kiyoshi Nishimoto

Session ID: B21
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.93.0

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Modeling and analysis of kinematic deviations of shape generation motions of machine tools

Modeling and analysis of rotary tables

Hitomi Watabiki, Nobuhiro Sugimura, Naoki Satonaka, Yoshitaka Tanimizu ...

Session ID: B23
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.95.0

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Study on Accuracy evaluation of a Machining Center Based on Measurement Results of Machined Workpiece

- Geometric accuracy by non-rotational machining -

Yoshitaka Morimoto, Shinji Tada, Yusuke Muroichi

Session ID: B24
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.97.0

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Improvement of Angle Deviation at Tilting Rotary Table of 5-Axis Control Machining Center (2nd Report)

Influence of Moving the Center of Gravity of Rotary Table

Kazumasa Nagao, Hideki Shibahara, Mikito Kumagai, Hiroshi Yamashita, Y ...

Session ID: B25
Published: 2009
Released on J-STAGE: February 25, 2010

DOIhttps://doi.org/10.11522/pscjspe.2009A.0.99.0

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This paper proposed the improvement method of the angle deviation at the tilting rotary table of five-axis control machining center. At five-axis control machining center composed of the tilting rotary table (A axis) and the rotary table (C axis), the offset load caused by moving the center of gravity on the rotary table might cause the angle deviation on the tilting rotary table. In this paper, the angle deviation was able to be estimated from the relation between the offset load and the rotary drive torque, then improvement of the angle deviation was obtained.

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