2009 JSPE Autumn Conference
Session ID : C04
Conference information
Host: The Japan Society for Precision Engineering
Development of LTP (long trace profiler) for x-ray mirrors at SPring-8
Hikaru Kishimoto, Yasunori Senba, Hirokatsu Yumoto, *Haruhiko Ohashi, Shunji Goto, Kazuto Yamauchi, Tetsuya Ishikawa
Author information
Keywords:
surface figure metrology,
stitching interferometry,
x-ray mirror,
x-ray optical device,
aspheric mirror,
synchrotron radiation
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