Proceedings of JSPE Semestrial Meeting
2009 JSPE Autumn Conference
Session ID : C18
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Host: The Japan Society for Precision Engineering

A study on lapping process of the single crystal SiC substrate using a cast iron plate
*Akihisa Kubota, Shiro Miyamoto, Yoshitaka Nakanishi, Mutsumi Touge
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Keywords: SiC, Lapping
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[in Japanese]
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© 2009 The Japan Society for Precision Engineering
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