2009 JSPE Autumn Conference
Session ID : A10
Conference information
Host: The Japan Society for Precision Engineering
Duplication of Surface Texture Measurement Standard by Nanoimprinting Technology
*Yukihito Yamaguchi, Kazuhisa Yanagi, Hidetake Tanaka, Masahide Yamaoka, Ichiro Yoshida
Author information
Keywords:
Nanoimprinting,
Surface Texture Measurement Standard,
Ultra Precision Machine Tool,
Duplication,
Measuring Instrument,
Focused Ion Beam
Details
