2009 JSPE Autumn Conference
Session ID : C23
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Host: The Japan Society for Precision Engineering
Planarization of GaN surface using photo-electro chemical process and solid acid catalyst
*Shun Sadakuni, Junji Murata, Keita Yagi, Yasuhisa Sano, Kenta Arima, Takeshi Okamoto, Hidekazu Mimura, Kazuto Yamauchi
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