Proceedings of JSPE Semestrial Meeting
2009 JSPE Autumn Conference
Session ID : C25
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Host: The Japan Society for Precision Engineering

Formation of Three-Dimentional Shape in Silicon by N-Fluoropyridinium Salt
*Kentaro Tsukamoto, Shigeharu Goto, Takabumi Nagai, Kenji Adachi, Junichi Uchikoshi, Mizuho Morita
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Keywords: N-fluoropyridinium, silicon, 3-D shape, photo-etching
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[in Japanese]
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© 2009 The Japan Society for Precision Engineering
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